PRODUCTS
SUB-SYSTEMS
Chambers for PVD and CVD applications
Wafer carriers, transports and aligners
Load lock transfers
Shower heads, gas cabinets and panels
AC Box
SUB-SYSTEM COMPONENTS
Substrate holders, substrate heating
Deposition sources
Valves and Gauges
Gas feeding systems and bubblers
Feedthroughs with ceramic to metal sealings
Ceramic components and sensors
Sputtering target holders, magnetic arrangements for heaters
ASSEMBLY AND INTEGRATION
Rotary, Roots, Cryo Pumps
Wafer Aligners
End Point Detectors
Quartz Crystal Thickness monitors